• DocumentCode
    23435
  • Title

    Thermal Metrology of Polysilicon MEMS using Raman Spectroscopy

  • Author

    Sean P. Kearney استاد مشاور , Zhuomin Zhang استاد مشاور , Samuel Graham استاد راهنما

  • University
    Georgia University Of Technology
  • Grade
    نامعلوم
  • Major
    Master of Science )Mechanical Engineering(
  • Number of pages
    0
  • Publish Date
    2005
  • Keyword

    thermal MEMS , microscale thermometry , POLYSILICON , Raman spectroscopy

  • Note
    01
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=17&DC=23435