• DocumentCode
    23486
  • Title

    Investigation of optical properties of InP, AIN and Sapphire for applications in non-contact semiconductor process monitoring

  • Author

    Cornely Roy H. استاد مشاور , Ravindra N. M. استاد راهنما

  • University
    Van Houten Library )new Jersey Institute Of Technology(
  • Grade
    نامعلوم
  • Major
    Master of Science )Electrical and Computer Engineering(
  • Number of pages
    0
  • Publish Date
    1998
  • Keyword

    Rapid thermal processing , Radiation pyrometers , Infrared Technology , Semiconductors

  • Note
    01
  • Language
    انگليسي