DocumentCode
23486
Title
Investigation of optical properties of InP, AIN and Sapphire for applications in non-contact semiconductor process monitoring
Author
Cornely Roy H. استاد مشاور , Ravindra N. M. استاد راهنما
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
نامعلوم
Major
Master of Science )Electrical and Computer Engineering(
Number of pages
0
Publish Date
1998
Keyword
Rapid thermal processing , Radiation pyrometers , Infrared Technology , Semiconductors
Note
01
Language
انگليسي
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