Title :
Formation and characterization of n/p shallow junctions in sub-micron MOSFETs
Author :
Fiory Anthony استاد مشاور , Ravindra N. M. استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Materials Science and Engineering(
Keyword :
Semiconductors , Leakage Current
