Title :
Programmable latching probe microstructures for wafer testing applications
Author :
Cornely Roy H. استاد مشاور , Carr William N. استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Department of Electrical and Computer Engineering(
Keyword :
Micro Electromechanical systems )MEMS( , Programmable wafer testing array