DocumentCode
24182
Title
Thermal Microactuators for Microelectromechanical Systems )MEMS
University
Brigham young University
Grade
نامعلوم
Number of pages
0
Publish Date
2003
Keyword
microactuator , themomechanical inplane micromechanisms , Thermal expansion , thermal expansion device , thermal actuator , Microelectromechanical systems , compliant micromechanism compliant mechanism , MEMS
Note
01
Language
انگليسي
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