Title :
Deposition of tantalum on steel by sputtering
Author :
Sosnowski Marek استاد راهنما , Levy Roland A. استاد مشاور
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Master of Science )Committee for the Interdisciplinary Program in Materials Science and Engineering(
Keyword :
Tantalum Thin Films , Tantalum Thin Films Desposition , Planar D.C.Magnetron Sputtering System , Cylindrical D.C.Magnetron Sputtering , Steel substrates
