DocumentCode
25093
Title
ACTIVE CONTROL OF A DIFFRACTION GRATING INTERFEROMETER FOR MICROSCALE DEVICES
Author
Thomas R. Kurfess استاد راهنما , William P. King استاد مشاور , F. Levent Degertekin استاد مشاور
University
Georgia Institute Of Technology
Grade
نامعلوم
Major
Master of Science
Number of pages
0
Publish Date
2004
Keyword
Metrology , MEMS , Interferometer , diffraction grating , microscale , active control , harmonic locking
Note
01
Language
انگليسي
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