DocumentCode :
25093
Title :
ACTIVE CONTROL OF A DIFFRACTION GRATING INTERFEROMETER FOR MICROSCALE DEVICES
Author :
Thomas R. Kurfess استاد راهنما , William P. King استاد مشاور , F. Levent Degertekin استاد مشاور
University :
Georgia Institute Of Technology
Grade :
نامعلوم
Major :
Master of Science
Number of pages :
0
Publish Date :
2004
Keyword :
Metrology , MEMS , Interferometer , diffraction grating , microscale , active control , harmonic locking
Note :
01
Language :
انگليسي
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=17&DC=25093
