DocumentCode
26148
Title
MEMS technology and devices for a micro fluid dosing system
Author
Axel Scherer استاد مشاور , Jerome Pine استاد مشاور , Yu-Chong Tai استاد راهنما
University
Caltech Library System
Grade
نامعلوم
Major
PhD
Number of pages
0
Publish Date
2003
Keyword
flow sensing , micro pump , parylene , MEMS. microfluidics , silicone rubber
Note
01
Language
انگليسي
Link To Document