• DocumentCode
    26315
  • Title

    Theoretical and Numerical Studies of the Air Damping of Micro-Resonators in the Non-Continuum Regime

  • Author

    Ayazi Farrokh استاد مشاور

  • University
    Georgia Institute Of Technology
  • Grade
    نامعلوم
  • Major
    Master of Science
  • Number of pages
    0
  • Publish Date
    2004
  • Keyword

    Quality factor , Resonator , MEMS , air damping

  • Note
    01
  • Language
    انگليسي