DocumentCode
26315
Title
Theoretical and Numerical Studies of the Air Damping of Micro-Resonators in the Non-Continuum Regime
Author
Ayazi Farrokh استاد مشاور
University
Georgia Institute Of Technology
Grade
نامعلوم
Major
Master of Science
Number of pages
0
Publish Date
2004
Keyword
Quality factor , Resonator , MEMS , air damping
Note
01
Language
انگليسي
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