مرکز منطقه ای اطلاع رساني علوم و فناوري - Laterally Movable Gate Field Effect Transistor )LMGFET( for Microsensor and Microactuator Applications

DocumentCode :

2751

Title :

Laterally Movable Gate Field Effect Transistor )LMGFET( for Microsensor and Microactuator Applications

Author :

Ashok Srivastava استاد مشاور , Martin Feldman استاد مشاور , Pratul K. Ajmera استاد راهنما

University :

Lovisiana State University

Grade :

دكتري

Major :

Doctor of Philosophy )Ph.D.( )Electrical Computer Engineering(

Number of pages :

Publish Date :

2005

Keyword :

MEMS , monolithic integration , post-IC fabrication , LMGFET , laterally movable gate FET , microactuator , microsensor , LIGA-like

Note :

Language :

انگليسي

Link To Document :