• DocumentCode
    2751
  • Title

    Laterally Movable Gate Field Effect Transistor )LMGFET( for Microsensor and Microactuator Applications

  • Author

    Ashok Srivastava استاد مشاور , Martin Feldman استاد مشاور , Pratul K. Ajmera استاد راهنما

  • University
    Lovisiana State University
  • Grade
    دكتري
  • Major
    Doctor of Philosophy )Ph.D.( )Electrical Computer Engineering(
  • Number of pages
    0
  • Publish Date
    2005
  • Keyword

    MEMS , monolithic integration , post-IC fabrication , LMGFET , laterally movable gate FET , microactuator , microsensor , LIGA-like

  • Note
    01
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=17&DC=2751