DocumentCode
3328
Title
Low energy implantation of boron with decaborane ions
Author
Chin Ken K. استاد راهنما , Farmer Kenneth Rudolph استاد مشاور , Jacobson Dale C. استاد مشاور
University
Van Houten Library )new Jersy Institute Of Technology(
Grade
دكتري
Major
Doctor of Philosophy )Materials Science and Engineering(
Number of pages
0
Publish Date
2001
Keyword
boron , Decaborane Ions , Si MOS Devices
Note
01
Language
انگليسي
Link To Document