• DocumentCode
    3328
  • Title

    Low energy implantation of boron with decaborane ions

  • Author

    Chin Ken K. استاد راهنما , Farmer Kenneth Rudolph استاد مشاور , Jacobson Dale C. استاد مشاور

  • University
    Van Houten Library )new Jersy Institute Of Technology(
  • Grade
    دكتري
  • Major
    Doctor of Philosophy )Materials Science and Engineering(
  • Number of pages
    0
  • Publish Date
    2001
  • Keyword

    boron , Decaborane Ions , Si MOS Devices

  • Note
    01
  • Language
    انگليسي