Title :
Synthesis and characterization of low pressure chemically vapor deposited boron nitride and titanium nitride films
Author :
Levy Roland A. استاد راهنما , Ravindra N. M. استاد مشاور
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Doctor of Philosophy )Committee for the Interdisciplinary Program in Materials Science and Engineering(
Keyword :
Titanium nitride , Low Pressure Chemically Vapor Deposited Films , boron nitride
