Title :
Plasma induced damage to Si and SiGe devices and materials
Author :
Sosnowski Marek استاد مشاور , Cornely Roy H. استاد مشاور , Misra Durgamadhab استاد راهنما
University :
Van Houten Library )new Jersey Institute Of Technology(
Major :
Doctor of Philosophy
Keyword :
SiGe , Plasma-Induced Damage
