• DocumentCode
    3625
  • Title

    Mathematical modeling of chemical vapor deposition processes and its application to thin film technology

  • Author

    Lewandowski Gordon استاد مشاور , Huang Ching-Rong استاد راهنما

  • University
    Van Houten Library )new Jersey Institute Of Technology(
  • Grade
    دكتري
  • Major
    Doctor of Philosophy )Chemical Engineering(
  • Number of pages
    0
  • Publish Date
    1991
  • Keyword

    Vapor-plating--Mathematical models , hin films

  • Note
    01
  • Language
    انگليسي