DocumentCode
3685
Title
Optimization studies of thermal bimorph cantilevers, electrostatic torsion actuators and variable capacitors
Author
Misra Durgamadhab استاد مشاور , Farmer Kenneth Rudolph استاد راهنما
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
دكتري
Major
Doctor of Philosophy )Committee for the Interdisciplinary Program in Materials Science and Engineering(
Number of pages
0
Publish Date
2004
Keyword
MEMS , Electrostatic torsion actuators , Bimorph cantilevers , Variable capacitors
Note
01
Language
انگليسي
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