3787

Electrostatic micro actuators for mirror and other applications

Federici John Francis استاد مشاور , Farmer Kenneth Rudolph استاد راهنما

New Jersey Institute Of Technology

دكتري

Doctor of Philosophy

0

2001

Micro-electro-mechanical systems )MEMS( , optical signal processing , electrostatic micro actuators , capacitance-based quasi-static design , electrostatic mirror devices

01

انگليسي