DocumentCode
4179
Title
Real-time malfunction diagnosis and prognosis of reactive ion etching using neural networks
Author
Gary S. May استاد راهنما
University
Georgia Institute Of Technology
Grade
دكتري
Major
Doctor of Philosophy
Number of pages
0
Publish Date
2003
Keyword
Real-time Control , Semicondcutors Etching Defects , Semiconductor wafers Defects , Semiconductors Failures , Semiconductors Defects , Antimony Environmental aspects
Note
01
Language
انگليسي
Link To Document