مرکز منطقه ای اطلاع رساني علوم و فناوري - Surface reactions during plasma enhanced chemical vapor deposition of silicon and silicon based dielectrics

DocumentCode :

451

Title :

Surface reactions during plasma enhanced chemical vapor deposition of silicon and silicon based dielectrics

Author :

Gregory N. Parsons استاد راهنما

University :

Raleigh North carolina state university

Grade :

نامعلوم

Major :

PhD )Chemical Engineering(

Number of pages :

Publish Date :

2001

Note :

Language :

انگليسي

Link To Document :