DocumentCode
4966
Title
Mesoscale Edge Characterization
Author
GRIFFIN PAUL M. استاد مشاور , Kurfess Thomas استاد راهنما , Chinn Douglas استاد مشاور
University
Georgia University Of Technology
Grade
دكتري
Major
Doctor of Philosophy
Number of pages
0
Publish Date
2006
Keyword
mesoscale manufacturing , Metrology , edge specification
Note
01
Language
انگليسي
Link To Document