• DocumentCode
    4966
  • Title

    Mesoscale Edge Characterization

  • Author

    GRIFFIN PAUL M. استاد مشاور , Kurfess Thomas استاد راهنما , Chinn Douglas استاد مشاور

  • University
    Georgia University Of Technology
  • Grade
    دكتري
  • Major
    Doctor of Philosophy
  • Number of pages
    0
  • Publish Date
    2006
  • Keyword

    mesoscale manufacturing , Metrology , edge specification

  • Note
    01
  • Language
    انگليسي