• DocumentCode
    5913
  • Title

    Measurement, optimization and multiscale modeling of silicon wafer bonding interface fracture resistance

  • Author

    Delannay Francis استاد راهنما , Dewolf Ingrid استاد مشاور

  • University
    UCL )Les Bibliotheques de L,Universite Catholique de Louvain(
  • Grade
    دكتري
  • Major
    FSA 3 - Doctorat en sciences appliqu{ف }es
  • Number of pages
    0
  • Publish Date
    2006
  • Keyword

    Wafer bonding , Interface toughness , multiscale modeling

  • Note
    01
  • Language
    انگليسي