DocumentCode
7265
Title
Gan -dielectric interface formation for gate dielectrics and passivation layers using remote plasma processing
Author
Gerald Lucovsky استاد راهنما
University
Raleigh North carolina state university
Grade
نامعلوم
Major
PhD )Electrical Engineering(
Number of pages
0
Publish Date
2003
Keyword
interface passivation SiO2 MOS gate dielectric Gan
Note
01
Language
انگليسي
Link To Document