DocumentCode
8639
Title
Thermal Stability of Transistion Metal Nitrides as NMOS Gate Electrodes
Author
Gerald Lucovsky استاد مشاور , Dennis Maher استاد مشاور , Jon - paul Maria استاد مشاور , Veena Misra استاد راهنما
University
Raleigh North carolina state university
Grade
نامعلوم
Major
PhD )Materials Science and Engineering(
Number of pages
0
Publish Date
2002
Keyword
metal gate electrode tantalum nitride
Note
01
Language
انگليسي
Link To Document