Title :
Deposition of Metal and Metal Oxide Thin Films from Matal Organic Precursors in Supercritical Carbon Dioxide Solution
Author :
Parsons Gregory N. استاد راهنما
University :
Raleigh North carolina state university
Major :
Master of Science )Chemical Engineering(
Keyword :
CFD GATE METAL ALD Sc CO2 Thin Film Deposition High K Dielectric
