Title :
Properties of Zr Silicate and Zr-Si Oxynitride High-k Dielectric Alloys for Advanced Microelectronic Applications; Chemical and Electrical Characterizations
Author :
Gerald Lucovsky استاد راهنما , Jon - paul Maria استاد مشاور , Robert Nemanich استاد مشاور , Carl Osburn استاد مشاور
University :
Raleigh North carolina state university
Major :
PhD )Materials Science and Engineering(
Keyword :
High-k , pseudo-binary)ternary( , Gate dielectric
