• Document code
    5240
  • Title

    Journal of Vacuum Science and Technology(Part B:Microelectronics)

  • ISSN
    0734-211X
  • Owner
    American Institute of Physics-
  • First year
    1964
  • ISC
    False
  • Publication stop
    False
  • Website
    http://ojps.org
  • Country
    آمريكا
  • City
    نيواورلئان
  • Language
    انگليسي