Fabrication And Study Of ZnO:AlThinfilm Nanostructure By Spray Pyrolysis

In the present work, a study ZnO and ZnO:Al(AZO) was deposited on glass ,silicon and porous silicon(PS) substratesby the low cost spray pyrolysis technique. The porous silicon (PS) substrates were formed by electrochemical anodization on p-type (100) silicon wafer, The effect of substrate type, and doping concentration on AZO thin layers have been investigated by analysing the structural, optical, and electrical properties of the flms.It was found that all films were polycrystalline with preferred [002] orientation, from the AFM surface morphology measurement, found the RMS roughness decreases with increasing the aluminium concentration . The electrical properties showed the conductivity variation of AZO films with different doping concentrations increase with increased Al concentrations. Maximum electrical conductivity 4.25 (S.cm^-1 )was obtained at a doping concentration of 3% .from I-V characteristics found The ideality factors (𝑛~ 2) of the prepared heterojunction are observed in the interim bias voltage range.The optical transmittance was about 85% in visible range for the optimum film.