The Low Energy Range Straggling Parameters of Heavy Ions in Solids

Range and range straggling parameters were determined for the implantation of Li ions into(C, N, Cu, Ag), and Ne ions into Be at energies of about (50-300) keV, and for N ions into (Al, C, Be) at energies of about (50-500) keV. At low energy, the nuclear and electronic stopping cross sections are found to contribute to the stopping process. Also, good agreement with experimental results is found.