3632

A Novel Electrostatically Actuated High Q RF MEMS Tunable Capacitor for UHF Applications

Hadi Mirzajani , Habib Badri Ghavifekr ,

Tunable Capacitor , microsystem , microelectromechanical system , MEMS , Radio Frequency circuit , RF-MEMS, Varactor

ايران

Mehrdad Khodapanahandeh

Tunable Capacitor; microsystem; microelectromechanical system; MEMS; Radio Frequency circuit; RF-MEMS, Varactor