• شماره ركورد كنفرانس
    3632
  • عنوان مقاله

    Fabrication of P-Type Microcrystalline Silicon Thin Film by Magnetron Sputtering and Copper Induced Crystallization

  • پديدآورندگان

    Jian Wang ,

  • كليدواژه
    microcrystalline silicon thin film , magnetron sputtering , copper induced crystallization , characterization
  • كشور
    ايران
  • نويسنده
    Omid Shekoofa
  • كلمات كليدي
    microcrystalline silicon thin film; magnetron sputtering; copper induced crystallization; characterization