شماره ركورد كنفرانس :
3782
عنوان مقاله :
Hydrogen Detection using Capacitive Method
پديدآورندگان :
fekri aval l. leila2mst@yahoo.com Science and Research Branch, Islamic Azad University , behzadi pour g. ghobadbehzadi@yahoo.com east tehran branch islamic azad univercity
كليدواژه :
nanoparticles , Response , Recovery , Hydrogen
عنوان كنفرانس :
اولين همايش ملي فناوري هاي نوين در نانو كامپوزيت ها
چكيده فارسي :
In this study a MOS capacitor hydrogen sensor with Pd/SiO2/Si structure has been fabricated. The palladium nanoparticles by chemical method are synthesized and then characterized by transmission electron microscope (TEM). The sensing mechanism of the hydrogen detection by MOS capacitor sensor has been explained and theoretical and experimental results have been compared. The presented sensor illustrates a designing of hydrogen detectors with very fast response and recovery speed
