Application of fast analytical design on MEMS pressure sensors

This study provides a fast analytical design for Micro Electro-mechanical system (MEMS) pressure sensors. By utilizing the Kirchhoff-Love law and perfect gas theory to design an analytical model of pressure sensors, it shows that square pressure sensors withstand higher pressure in comparison with the circular ones and they are more sensitive as well. This demonstrates the high performance of these sensors. Applying pressure in the cavity of the pressure sensors with constant cavity temperature also can lead to an increase in performance period of these sensors while the variations in temperature may change the results. Comparing the obtained results to the reference 6 approves this claim.