شماره ركورد كنفرانس :
3723
عنوان مقاله :
Electrostatic MEMS switch with vertical beams and body biasing
عنوان به زبان ديگر :
Electrostatic MEMS switch with vertical beams and body biasing
پديدآورندگان :
Bahmanyaran Armin arminiufb@yahoo.com university of Shahid Beheshti Tehran, Iran , Jafari Kian kian.jafari@gmail.com university of Shahid Beheshti Tehran, Iran
كليدواژه :
Switch , electrostatic actuator , micro electro mechanical systems , bulk terminal , vertical beams , pull , in voltage
عنوان كنفرانس :
دومين كنفرانس بين المللي در مهندسي برق
چكيده فارسي :
One of the easiest and the most appropriate solution for fabricating MEMS switch is Electrostatic actuation. However, it requires large parallel plates which can take a large surface on the substrate wafer and thus an expensive fabrication cost. In this paper, an improved electrostatic MEMS switch is presented. The proposed design is carried out so that it minimizes the dimensions of the MEMS device. Simulation results are also done by COMSOL based on the proposed design
