طراحي و ساخت نگهدارنده زيرلايه چترهاي چرخشي مختلف براي دستگاه لايه نشاني BalzersBAK760

The coating machine “Balzers BAK760” is used to make of thin films by physical evaporation method or Physical Vapor Deposition method (PVD). The rotation umbrella of this machine is designed so that interval substrates of electron gun are symmetric. For the steady accumulation layer on the substrate, the umbrella must rotate with a certain speed. This umbrella is designed to coating of flat substrates or substrates with very large radius of curvature (that in small size are seems flat). For coating on the substrates with different shapes, should be designed and made of different umbrellas and holders. In this paper have been reported the design and construction of three umbrella and holders for coating of cylindrical substrates and Gaussian mirrors.