شماره ركورد كنفرانس :
4561
عنوان مقاله :
Effect of thickness of thin films on mechanical properties measured by nano-indentation and comparison with molecular dynamic (MD) simulation
Author/Authors :
M.R Ayatollahi Fatigue and Fracture Laboratory - Center of Excellence in Experimental Solid Mechanics and Dynamics - School of Mechanical Engineering - Iran University of Science and Technology, Tehran , A Rahimi Fatigue and Fracture Laboratory - Center of Excellence in Experimental Solid Mechanics and Dynamics - School of Mechanical Engineering - Iran University of Science and Technology, Tehran , A Karimzadeh Fatigue and Fracture Laboratory - Center of Excellence in Experimental Solid Mechanics and Dynamics - School of Mechanical Engineering - Iran University of Science and Technology, Tehran
كليدواژه :
nano-indentation , thin films , molecular dynamics simulation , nano–indentation test , mechanical properties
عنوان كنفرانس :
The Bi-Annual International Conference on Experimental Solid Mechanics and Dynamics ۲۰۱۴
چكيده لاتين :
Thin films have become increasingly important in physics and engineering due to their uses in semiconductors, mirrors, lens coatings, and many other applications. This field will become even more vibrant as we try to make appliances and systems smaller and thinner. Nano-indentation is one of the most known methods for investigating the properties of thin films. It is a known fact that thin layers are characterized by different mechanical properties than their bulk samples. This study focuses on investigation of different thin layers by nano-indentation test with a support of molecular dynamic simulation. In order to carry out the study, thin layers of different thickness values were coated on a substrate. The coated samples were simulated in LAMMPS, molecular dynamic software, and the Young’s modulus and hardness of coatings were determined. The results were then compared with the experimental data available in literature.
