شماره ركورد كنفرانس :
360
عنوان مقاله :
Pore structure modification of ceramic membranes using magnetron sputtering system
عنوان به زبان ديگر :
Pore structure modification of ceramic membranes using magnetron sputtering system
پديدآورندگان :
Khamseh Samaneh نويسنده Department of Computer Engineering, Science and Research Branch, Islamic Azad university, Ilam, Iran
كليدواژه :
magnetron sputtering , physical vapor deposition , Ceramic membrane , Pore structure
عنوان كنفرانس :
The 6 th International Color & Coating Congress
چكيده فارسي :
The technique of magnetron sputtering is applied to the structural modification and pore tailoring of ceramic membranes. Ceramic microfiltration membranes with an average pore size of 40 nm are used as substrates, on which Al2O3 is deposited by magnetron sputtering with the purpose to tailor their pore size. The thickness of the deposited Al2O3 layer increases with RF power. It was confirmed by scanning electron microscopy that the pore size of the ceramic membrane decreases with increasing RF power until the pores are completely sealed. It is found that an ultrathin selective layer with a gradient porous structure is formed. With the increased RF power, the Al2O3-deposited membranes have a decreasing water flux. The membrane coated with RF power of 210W has a reduced pure water flux from 1720 L (m2 h bar)−1 for an undeposited membrane to 80 L (m2 h bar)−1.
شماره مدرك كنفرانس :
4184098
