An Investigation into the Non-Linear Dynamic Pull-In Instability of Beam-Type MEMS Structures under Distributed Electrostatic Force Considering SQFD Phenomenon

This paper presents non-linear dynamic pull-in instability response of beam-type MEMS structures under distributed electrostatic force considering squeeze-film damping (SQFD) phenomenon. The governing equation is derived based on the Euler-Bernoulli beam theory. The Generalized differential quadrature method (GDQM) is employed to produce high accu-rate approximate solution. Furthermore, SQFD phenomenon is analyzed through modified Reynolds equation for small amplitude vibration. To this end, the results are verified with previous experimental and linear studies. It is also indicated that the variation of pressure leads to change in dynamic pull-in instability.