پديدآورندگان :
Sareminia Gh نويسنده aSAiran-Electronic Components Industry (ECI)-Optoelectronic industry P.O.Box , Hajian M نويسنده Department of Electrical and Computer Engineering, Semnan University, Semnan, Iran , Valizadeh Gholamabbas نويسنده Cardiovascular Intervention Research Center, Rajaie Cardiovascular, Medical and Research Center , Eminov Sh نويسنده Institute of Physics, Azerbaijan University.
چكيده فارسي :
1
Characterization of Photodiodes, Made from a p– type Epitaxial
Layer Grown on n- type InSb < 111> By LPE method.
Gh. Sareminia a,1, M. Hajian a,1, Gh. Valizadeha, Sh. Eminov b
aSAiran-Electronic Components Industry (ECI)-Optoelectronic industry P.O.Box
19575 – 199, Tehran, Iran.
b Institute of Physics, Azerbaijan University.
1E-mail addresses: saremigh@yahoo.com, mahmoud.hajian@yahoo.com.
Abstract: In this article the performance of
photodiodes made on epitaxial grown layers of
p–InSb on n-type InSb substrates is reported. The
effect of increasing Cd atomic weigh percent on
p- type carrier concentration and mobility at 77K
is also discussed. In our epitaxial growth method,
a ramp cooling technique was used. Finally by
improving growth parameters such as growth
temperature, prior cleaning of B-face (Sb)n-InSb
substrates and different cooling rates, adequate
epitaxial layers of p–InSb on n–InSb<111>
and consequently highly sensitive photodiodes
have been obtained .A high detectivety for
photodiodes fabricated by liquid phase epitaxial
(LPE) method was measured using optoelectronic
tests. Several other tests such as Hall Effect,
thickness measurements, I–V and x-ray diffraction
(XRD) were also performed and morphology
images will be presented in this paper.
Keywords: , LPE, Ramp
cooling, Growth temperature,
temperature, cleaning InSb.