EBEOĞLUGİL, Mehmet Faruk Dumlupinar University - Engineering Faculty - Department of Material and Ceramic Engineering, Turkey , ÇELİK, Erdal Dokuz Eylul University - Engineering Faculty, Center for Production and Applications of Electronic Materials (EMUM) - Department of Metallurgical and Materials Engineering, Turkey

A New Insight on Pb(Mg1/3Nb2/3)O3 Nano Scale Powders for Thin Film Capacitor

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The present paper extensively demonstrates synthesis, characterization and electrical properties of relaxor ferroelectric Pb(Mg1/3Nb2/3)O3 (PMN) nano scale powders and PMN thin films on n-type Si substrates using sol-gel technique for capacitor applications. Transparent solutions were prepared from Pb, Mg and Nb based precursors, methanol and glacial acetic acid (GAA). The obtained solutions were dried at 80°C for 60 minutes in air to form gel structure of PMN mixture and heat treated at 530°C for 3 hours and subsequently sintered at the temperature range of 800 °C and 1000°C for 2 hours in air. After the sintering, the PMN powders were milled for 24 hours to obtain nano scale powders. The powder size was measured using particle size machine. Finally the powders were dispersed in alcohol and the obtained suspension was coated on n-type Si substrates. The films were dried at 50°C for 15 minutes and subsequently were heat treated at 730 °C for 30 minutes in air to ensure its adhesion strength. Thermal, structural, microstructural, mechanical and electrical properties of the powder and the coatings were characterized by DTA/TG, FTIR, XRD, SEM, refractometer, spectrophotometer and high resolution dielectric analyzer machines. The study provides a new insight on the nano scale powders of PMN structure coated on Si semiconducting surface.

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PMN , Nano powder , Capacitance , Dielectric , Thin film

Afyon Kocatepe University Journal Of Science an‎d Engineering

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