bakan, feray sabancı üniversitesi - nanoteknoloji araştırma ve uygulama merkezi, İstanbul, Türkiye , sezen, meltem sabancı üniversitesi - nanoteknoloji araştırma ve uygulama merkezi, İstanbul, Türkiye

Nanostructuring applications for functionalization of polymer surfaces with focused ion beam

41005

Today’s studies cover the use of polymers in a broad range of applications owing to rapid development towards their optimized structural properties. On the other hand, the shrinkage in the dimensions of the novel materials, structures and systems down to atomic scale as an output of nanotechnology has assigned Electron Microscopy as the inseparable part of this field. Controllable surface modification allows tuning of surface properties in intended directions and thus provides the use of the ultimate materials and their systems towards desired and pre-defined concepts. This study mainly focused on investigation, optimization and modification of surface properties of various polymers via the use of electron and ion beam irradiation in a controlled way. In particular, surface modification processes were carried out through gas-assisted etching (GAE) in a FIB-SEM dual-beam instrument equipped with gas injections systems (GIS). The main study concerns XeF2 assisted etching of polymer surfaces to obtain minimum surface morphology with high surface angles. The alterations in the surface properties provided by surface modification processes performed in FIB-SEM dual-beam platforms were examined using other advanced analysis techniques.

893

FIB , Focused electron , ion beam induced deposition , Functional polymer surfaces , Surface characterization , Nanostructuring , Maskless lithogarphy

Pamukkale University Journal Of Engineering Sciences

898