LiNbO3 waveguide quasi-phase-matching second harmonic generation devices with ferroelectric-domain-inverted gratings formed by electron-beam scanning

The characteristics of the formation of LiNbO₃ ferroelectric-domain-inverted gratings using electron-beam scanning are examined and discussed for application to waveguide quasi-phase-matching second-harmonic-generation (SHG) devices. It is found that the domain inversion tends to occur in segmented regions, and the inversion width is thinner near the crystal surface than inside the crystal. The dependence of the SHG efficiency on the grating structure is examined theoretically. Prototype devices for green and blue light generation have been fabricated and the device performance examined. Normalized SHG efficiencies as high as 50%/W and 70%/W, respectively, are obtained in green and blue light generation devices of 3.3-mm length. The experimental results are compared with the theoretical results