DocumentCode
1000769
Title
Advances in precise positioning using the electrostatic glass motor
Author
Moser, Roland ; Sache, Laurent ; Cassat, Alain ; Higuchi, Toshiro ; Bleuler, Hannes
Author_Institution
Switzerland Ltd., Baden, Switzerland
Volume
41
Issue
4
fYear
2005
Firstpage
972
Lastpage
977
Abstract
This paper reports the continuation of the authors´ work in the field of linear and rotary submicrometric positioning using electrostatic glass motors. Electrostatic glass motors, a recent development where a glass rotor, once polarized using a static electrostatic field, is synchronously following a moving electrostatic field, have been described previously. The potential application to precise positioning was proven feasible and promising. The present report describes a fully operational rotary prototype, featuring remarkable performance. It will be shown that sub-arc-second positioning is possible in open-loop operation, over an infinite operation range, and over a very broad speed range. After a brief recapitulation of the propulsion principle, the realized system will be presented and characterized, its performance experimentally determined, and discussed. Finally, potential industrial applications of the electrostatic glass motor will be proposed.
Keywords
electric actuators; electric fields; electric propulsion; electrostatic motors; position control; rotors; electrostatic glass motors; linear positioning; potential industrial applications; precise positioning; propulsion principle; rotary submicrometric positioning; static electrostatic field; Actuators; Electrodes; Electrostatics; Glass; Industry Applications Society; Laboratories; Propulsion; Rotors; Stators; Synchronous motors; Electrostatic glass motors; electrostatic induction; linear nanometric positioning; rotary sub-arc-second positioning;
fLanguage
English
Journal_Title
Industry Applications, IEEE Transactions on
Publisher
ieee
ISSN
0093-9994
Type
jour
DOI
10.1109/TIA.2005.851015
Filename
1468273
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