DocumentCode :
1000769
Title :
Advances in precise positioning using the electrostatic glass motor
Author :
Moser, Roland ; Sache, Laurent ; Cassat, Alain ; Higuchi, Toshiro ; Bleuler, Hannes
Author_Institution :
Switzerland Ltd., Baden, Switzerland
Volume :
41
Issue :
4
fYear :
2005
Firstpage :
972
Lastpage :
977
Abstract :
This paper reports the continuation of the authors´ work in the field of linear and rotary submicrometric positioning using electrostatic glass motors. Electrostatic glass motors, a recent development where a glass rotor, once polarized using a static electrostatic field, is synchronously following a moving electrostatic field, have been described previously. The potential application to precise positioning was proven feasible and promising. The present report describes a fully operational rotary prototype, featuring remarkable performance. It will be shown that sub-arc-second positioning is possible in open-loop operation, over an infinite operation range, and over a very broad speed range. After a brief recapitulation of the propulsion principle, the realized system will be presented and characterized, its performance experimentally determined, and discussed. Finally, potential industrial applications of the electrostatic glass motor will be proposed.
Keywords :
electric actuators; electric fields; electric propulsion; electrostatic motors; position control; rotors; electrostatic glass motors; linear positioning; potential industrial applications; precise positioning; propulsion principle; rotary submicrometric positioning; static electrostatic field; Actuators; Electrodes; Electrostatics; Glass; Industry Applications Society; Laboratories; Propulsion; Rotors; Stators; Synchronous motors; Electrostatic glass motors; electrostatic induction; linear nanometric positioning; rotary sub-arc-second positioning;
fLanguage :
English
Journal_Title :
Industry Applications, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-9994
Type :
jour
DOI :
10.1109/TIA.2005.851015
Filename :
1468273
Link To Document :
بازگشت