A high-power MEMS electric induction motor

Author

Livermore, Carol ; Forte, Anthony R. ; Lyszczarz, Theodore ; Umans, Stephen D. ; Ayon, Arturo A. ; Lang, Jeffrey H.

Author_Institution

Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA

Volume

13

Issue

3

fYear

2004

fDate

6/1/2004 12:00:00 AM

Firstpage

465

Lastpage

471

Abstract

An electric induction micromotor with a 4-mm-diameter rotor was designed and built for high-power operation. Operated at partial actuating voltage, the motor has demonstrated an air gap power in excess of 20 mW and torque of 3.5 μNm at speeds in excess of 55 000 rpm. Operation at higher power and speed was limited by bearing stability at higher rotational speeds. The device builds on an earlier micromotor demonstrated by Frechette et al. The high power of the present motor is enabled by its low-loss, high-voltage electric stator, which also offers improved efficiency. The development of this electromechanical device is an important enabling step not only for watt-scale micromotors, but also for the development of microelectric generators. This paper presents the motor´s design, the fabrication process that was created to meet its stringent design requirements, and its performance to date.

Keywords

air gaps; induction motors; micromotors; rotors; 20 mW; 4 mm; MEMS electric induction motor; air gap power; bearing stability; electric stator; electromechanical device; high-power operation; microelectric generators; microfabrication; partial actuating voltage; power microelectromechanical systems; rotational speed; watt-scale micromotors; Electromechanical devices; Induction motors; Micromechanical devices; Micromotors; Process design; Rotors; Stability; Stators; Torque; Voltage; Electric induction; MEMS; microfabrication; micromotor; power microelectromechanical systems;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2004.828736

Filename

1303624