Title :
Electromagnetically actuated mirror arrays for use in 3-D optical switching applications
Author :
Bernstein, Jonathan J. ; Taylor, William P. ; Brazzle, John D. ; Corcoran, Christopher J. ; Kirkos, Gregory ; Odhner, Jefferson E. ; Pareek, Ajay ; Waelti, Marc ; Zai, Marvin
Author_Institution :
Charles Stark Draper Lab. Inc., Cambridge, MA, USA
fDate :
6/1/2004 12:00:00 AM
Abstract :
This paper presents an electromagnetic MEMS mirror technology for use in 3-D optical switching applications. These mirrors may be actuated through large angles at low voltage and low current. Multiple coils on the backs of the mirrors interact with permanent magnetic fields to provide two-axis orthogonal actuation. A custom package brings the MEMS mirror array and magnets into close proximity. Actuation is linear versus drive current on both axes, and displays negligible charging and drift. These mirrors have achieved greater than 10° mechanical rotation per mA in each axis. The mirror rotation angle is hysteresis free to less than the 0.01° measurement accuracy.
Keywords :
electromagnetic actuators; micromachining; micromirrors; optical arrays; optical switches; 3D optical switching applications; drive current; electromagnetic MEMS mirror; electromagnetic actuation; electromagnetically actuated mirror arrays; magnetic transducers; micromachining; mirror rotation angle; multiple coils; permanent magnetic fields; quadrupole; two-axis orthogonal actuation; Coils; Displays; Drives; Low voltage; Magnetic fields; Magnets; Micromechanical devices; Mirrors; Optical arrays; Packaging; Actuators; electromagnetic actuation; magnetic transducers; micromachining; mirror array; optical switching; quadrupole;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2004.828705
