Title :
Total dose radiation hardness of MOS devices in hermetic ceramic packages
Author :
Kohler, Ross A. ; Kushner, Richard A. ; Lee, Kuo Hua
Author_Institution :
AT&T Bell Lab., Allentown, PA, USA
fDate :
12/1/1988 12:00:00 AM
Abstract :
The total-dose radiation hardness of hardened MOS transistors is experimentally shown to be degraded by hydrogen gas commonly trapped in hermetic-ceramic-package cavities. This introduces another variable to be considered in the manufacture and hardness assurance of total-dose-hardened integrated circuits. The observation also extends the link between hydrogen and interface-state formation to the understanding of hydrogen´s role in ionizing radiation effects. It is concluded from experiments in which hydrogen is diffused into irradiated oxides after Co-60 exposure that the diffusing hydrogen interacts with independently created radiation damage to form interface states
Keywords :
hydrogen; insulated gate field effect transistors; integrated circuit technology; packaging; radiation hardening (electronics); semiconductor technology; semiconductor-insulator boundaries; 60Co radiation; Co-60 exposure; H2 gas effects; Si-SiO2; hardened MOS transistors; hardness assurance; hermetic ceramic packages; interface-state formation; ionizing radiation effects; irradiated oxides; radiation hardened electronics; total-dose radiation hardness; total-dose-hardened integrated circuits; CMOS technology; Ceramics; Hermetic seals; Hydrogen; Interface states; MOS devices; Packaging; Radiation effects; Radiation hardening; Testing;
Journal_Title :
Nuclear Science, IEEE Transactions on