DocumentCode :
1001926
Title :
10-nm channel length pentacene transistors
Author :
Lee, Josephine B. ; Chang, Paul C. ; Liddle, J.Alexander ; Subramanian, Vivek
Author_Institution :
Electr. Eng. & Comput. Sci. Dept., Univ. of California, Berkeley, CA, USA
Volume :
52
Issue :
8
fYear :
2005
Firstpage :
1874
Lastpage :
1879
Abstract :
Organic thin-film transitors (OTFTs) were fabricated with channel lengths as small as 10 nm and an operating voltage of VDD=-0.3 V using e-beam lithography. For sub-200-nm channel lengths, scaling L downwards resulted in increased on-current, decreased Ion/Ioff ratio, VT-rolloff, and drain-induced barrier lowering. These trends are correlated with device topology, electrostatics, and thin-film morphology. Nanoscale OTFT are interesting both as a means of studying intrinsic electrical properties of organic materials and as a possible route toward increasing on-current in organic devices. This paper sheds light on many of the issues encountered when shrinking organic devices, providing insight into approaches for optimizing nanoscaled OTFT.
Keywords :
electron beam lithography; nanotechnology; organic semiconductors; thin film transistors; -3 V; 10 nm; 200 nm; device electrostatics; device topology; drain-induced barrier lowering; e-beam lithography; intrinsic electrical properties; nanoscale OTFT; organic materials; organic thin-film transitors; pentacene transistors; thin-film morphology; Electrostatics; Lithography; Morphology; Nanoscale devices; Organic thin film transistors; Pentacene; Thin film devices; Thin film transistors; Topology; Voltage; E-beam lithography; nanoscale; organic thin-film transitors (OTFTs); pentacene;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2005.851845
Filename :
1468381
Link To Document :
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