An optical self-calibrating technique for the dynamic characterization of PZT´s

Author

Minoni, Umberto ; Docchio, Franco

Author_Institution

Dipartimento di Automazione Ind., Brescia Univ., Italy

Volume

40

Issue

5

fYear

1991

fDate

10/1/1991 12:00:00 AM

Firstpage

851

Lastpage

854

Abstract

A system suitable for the measurement of linear sinusoidal vibration amplitudes is described. The signal beam of a Michelson interferometer is focused on the vibrating target while a suitable phase noise is applied to the reference arm of the interferometer. Signal processing is based on the null adjustment of the Bessel coefficients J₁ and J₂ derived from the signal provided by a single photodiode placed in the center fringe of the interference pattern. The system has been shown to be self-calibrating and intrinsically immune to mechanical perturbations induced in the interferometer. The technique proposed has been experimentally demonstrated by measuring the vibration amplitude of a PZT device in the amplitude range from 0.4 to 1.7 μm and in the frequency range from 8 to 22 kHz

Keywords

calibration; lead compounds; light interferometry; vibration measurement; 8 to 22 kHz; Bessel coefficients; Michelson interferometer; PZT; PZT device; PbZrO3TiO3; displacement measurement; dynamic characteristics; interference pattern; linear sinusoidal vibration amplitudes; null adjustment; optical self-calibrating technique; phase noise; reference arm; signal processing; single photodiode; vibrating target; Interference; Optical interferometry; Optical mixing; Optical noise; Optical refraction; Optical variables control; Phase noise; Photodiodes; Signal processing; Vibration measurement;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.106310

Filename

106310