Title :
Influence of temperature on magnetic properties of ion-beam sputter-deposited perpendicular magnetic media
Author :
Maloney, William T. ; Lustig, Claude D.
Author_Institution :
Polaroid Corporation, Cambridge, MA
fDate :
7/1/1984 12:00:00 AM
Abstract :
Co-Cr perpendicular magnetic media deposited by ion-beam sputter methods show magnetic properties similar to those obtained by radio frequency (RF) sputtering. Coercivity, ratio of perpendicular to parallel squareness, and X-ray orientation are strikingly improved when the substrate is heated. Independent control of substrate temperature makes ion-beam sputter deposition an attractive candidate for deposition of perpendicular magnetic films.
Keywords :
Ion-beam applications; Magnetic films/devices; Magnetic recording/recording materials; Magnetic thermal factors; Sputtering; Coercive force; Helium; Magnetic films; Magnetic properties; Magnetic separation; Magnetization; Radio frequency; Sputtering; Substrates; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1984.1063124
