Title :
Modeling of liquid phase epitaxy for magnetic bubble films
Author :
Mayberry, Michael C.
Author_Institution :
Intel Corp., Santa Clara, CA, USA
fDate :
1/1/1988 12:00:00 AM
Abstract :
Magnetic garnet films suitable for magnetic bubble memories are grown by means of liquid phase epitaxy from multicomponent melts. This growth process has been successfully modeled using an electronic spreadsheet. Given initial film properties measured by one growth run, the model will predict the properties of future growth runs, including the effects of changes in temperature, growth rate, or composition. It has aided development of several new melts
Keywords :
chemistry computing; electronic engineering computing; garnets; liquid phase epitaxial growth; magnetic bubble memories; composition; electronic spreadsheet; film properties; growth process; growth rate; liquid phase epitaxy; magnetic bubble films; magnetic bubble memory; magnetic garnet films; modelling; multicomponent melts; temperature; Calcium; Epitaxial growth; Garnet films; Germanium; Iron; Magnetic films; Magnetic liquids; Predictive models; Production; Semiconductor process modeling; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
