Uniform 8x8 array InGaAs/InP multiquantum well asymmetric Fabry-Perot modulators for flipchip solder bond hybrid optical interconnect

The first 8x8 arrays of multiquantum well asymmetric Fabry-Perot modulators in the InGaAs/InP material system are reported. These arrays have optical access through the substrate and are flipchip solder bond assembled for direct connection to silicon integrated circuits for optical interconnect applications. A high degree of uniformity of response is obtained across the array with a mean contrast ratio of 3.5 dB, with a standard deviation of 0.25 dB. Over a 4x4 mm² chip the standard deviation of peak operating wavelength of the cavity resonance is 3.3 nm.