DocumentCode
1004568
Title
Application of micro-airbridge isolation in high speed HBT fabrication
Author
Tadayon, S. ; Metze, G. ; Cornfeld, A. ; Pande, Krishna ; Huang, Heng ; Tadayon, B.
Volume
29
Issue
1
fYear
1993
fDate
1/7/1993 12:00:00 AM
Firstpage
26
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19930017
Filename
256161
Link To Document